An improved energy analysing electron microscope

An electron spectrometer has been attached to a Siemens Elmiskop I electron microscope in order to combine the facilities of microanalysis and conventional high magnification transmission electron microscopy of metals and alloys. Modifications have been made to the original design described by Cundy, Metherell and Whelan to improve both mechanical stability and microscope vacuum. The resolution of the equipment is 12 AA (Fresnel fringe), the specimen drift rate is 0.5 AA s -1 and the contamination rate of the specimen is less than 5 AA min -1 . For typical exposure times the spatial resolution of the equipment is limited to about 100-200 AA by specimen drift.