Low-loss titanium dioxide waveguides and resonators using a dielectric lift-off fabrication process

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We present a bi-layer lift-off fabrication approach to create low-loss amorphous titanium dioxide (TiO2) integrated optical waveguides and resonators for visible and near-infrared applications. This approach achieves single-mode waveguide losses as low as 7.5 dB/cm around 633 nm and 1.2 dB/cm around 1550 nm, a factor of 4 improvement over previous reports, without the need to optimize etching conditions. Depositing a secondary 260-nm TiO2 layer can reduce losses further, with the optimized process yielding micro-ring resonators with loaded quality factors as high as 1.5 × 10(5) around 1550 nm and 1.6×10(5) around 780 nm. These losses render our TiO2 devices suitable for visible and telecommunications applications; in addition, the simplicity of this lift-off approach is broadly applicable to other novel material platforms, particularly using near-visible wavelengths.