We investigated the effect of the substrate temperature on the magnetic, electrical and optical properties of nitrogen-doped ZnO thin films. Experiments showed that a high substrate temperature depresses the deposition rate and produces much thinner films displaying more robust ferromagnetism. In addition, the resistivity decreased as the substrate temperature increased and all of the nitrogen-doped films, at different substrate temperatures, had larger gaps than the pure ZnO film.
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Yu et al. (2008) studied this question.
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