Microtribology

Contacts in microsystems are under very light loads, and contact elements are made of hard materials. However, contact surfaces are not always atomically smooth but have relatively high peaks of asperity. Silicon is hard but has poor anti-wear properties. Good hard coatings thus become necessary for low wear. Liquid lubricants or adsorbed water generate meniscus forces and stiction. Therefore, a new lubrication method is required for coated surfaces. The present understanding of mechanisms of stiction and the generation of pull-off force and high friction is reviewed for such contact conditions. New hard coating materials and a new concept of N2 lubrication that exhibit promising friction and wear behaviour are introduced.