What question did this study set out to answer?

Review the operational challenges of Langmuir probe diagnostics in Gaseous Electronics Conference reference cells and define standard benchmark plasma parameters.

July 1, 1995Journal of Research of the National Institute of Standards and TechnologyOpen Access

Langmuir Probe Measurements in the Gaseous Electronics Conference Rf Reference Cell

View Full Paper

Ask AI

Bookmark

Review the operational challenges of Langmuir probe diagnostics in Gaseous Electronics Conference reference cells and define standard benchmark plasma parameters.
Operated Langmuir probe diagnostic systems within two standardized Gaseous Electronics Conference radio-frequency reference cells.
Measured plasma density, plasma-to-ground sheath resistance, and electron energy distribution functions across varying radio-frequency voltages, gas pressures, and discharge currents in argon and nitrogen.
Argon plasma density was 9 × 10^9 cm^-3 (±20%) at 250 V applied radio-frequency voltage and 13.3 Pa (100 mTorr) pressure, exhibiting a linear scaling with applied voltage.
Plasma-to-ground sheath resistance reached 810 ohms at 13.3 Pa and 0.1 A discharge current in argon, scaling inversely with current and sublinearly with pressure.
Resolved standard benchmark features in electron energy distribution functions, including a transition from a bi-Maxwellian (<1 eV) to a Druyvesteyn distribution (3 eV) in argon at 13.3 Pa and an energy dip at 2 eV to 4 eV in nitrogen.

Discussion

No takes yet. Share an insight, caveat, or question.

Implication

Experimental review demonstrates benchmark plasma parameters and distribution functions in radio-frequency reference cells, highlighting standardized diagnostic capabilities of Langmuir probes.

Cite This Study

M. B. Hopkins (1995) studied this question.

synapsesocial.com/papers/6a988ad05945efa7e22ad862 https://doi.org/10.6028/jres.100.031

View Full Paper

Ask AI

Bookmark

Implication

Experimental review demonstrates benchmark plasma parameters and distribution functions in radio-frequency reference cells, highlighting standardized diagnostic capabilities of Langmuir probes.

Langmuir Probe Measurements in the Gaseous Electronics Conference Rf Reference Cell

Key Points

Discussion

Implication

Cite This Study

Langmuir Probe Measurements in the Gaseous Electronics Conference Rf Reference Cell

Key Points

Discussion

Implication

Cite This Study

Also Consider

Also Consider