Dynamical calculations for RHEED from MBE growing surfaces. I. Growth on a low-index surface

Dynamical diffraction calculations have been made for reflection high-energy electron diffraction (RHEED) from molecular beam epitaxy (MBE) growing surfaces. Effects due to both the diffraction and growth conditions on the RHEED intensity oscillations during MBE growth have been investigated in detail for perfect layer growth, non-diffusive, diffusive growth, and distributed growth on a low-index surface. The results are compared with the kinematic diffraction theory, and are shown to be able to reproduce almost all features of measured RHEED intensity oscillations from low-index surfaces.