Thermodynamic Calculations and Metallorganic Chemical Vapor Deposition of Ruthenium Thin Films Using Bis(ethyl‐π‐cyclopentadienyl)Ru for Memory Applications, Kang, Sang Yeol, Choi, Kook Hyun, Lee, Seok Kiu, Hwang, Cheol Seong, Kim, Hyeong Joon
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Kang et al. (2000) studied this question.