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October 1, 1984Journal of The Electrochemical Society

Phosphorus‐Doped Polycrystalline Silicon via LPCVD: II . Surface Interactions of the Silane/Phosphine/Silicon System

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Authors

BMB.S. MeyersonJohannes Kepler University of LinzMYMingzhu YuSouthwest University

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Meyerson et al. (1984) studied this question.

synapsesocial.com/papers/6a99918ca8a2eaea4554c2c4https://doi.org/10.1149/1.2115259
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