Modeling and calculation of the capacitance of a planar capacitor containing a ferroelectric thin film

The capacitance of a two-layer planar capacitor containing a thin layer of SrTiO3 is calculated by conformal mapping using the partial capacitanc e method. Simple formulas are obtained for approximation calculation of the capacitances of individual components of a planar structure, and their limits of applicability are determined. A relation for the capacitance of a planar capacitor is derived which takes account of the size effect in a ferroelectric film within the context of the partial capacitance method. The calculated result is compared with the experimentally measured capacitance.