Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection, Potts, S. E., Schmalz, L., Fenker, M., Díaz, B., Światowska, J., Maurice, V., Seyeux, A., Marcus, P., Radnóczi, G., Tóth, L., Kessels, W. M. M.
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Potts et al. (2011) studied this question.
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