Laser direct-write metallization in metallo-organic films involves complex thermal profiles and changes in optical properties that affect the spatial resolution, chemical purity, and electrical properties of the resulting features. Compositional profiles of the metal features, determined by scanning Auger electron spectroscopy, are reported and correlated with the chemistry of the laser-initiated thermal reaction and the observed feature structure. Studies of the changes in optical properties of the films by conventional thermal decomposition offer important insights into the reaction mechanisms. We also report an optimized development procedure for the laser-exposed samples.
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Gross et al. (1986) studied this question.
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