Optoelectronic VLSI switching chip with greaterthan 1 Tbit/s potential optical I/O bandwidth

The authors describe an optoelectronic switching chip with 1024 differential optical inputs and 1024 differential optical outputs with individual channels tested above 600 Mbit/s. The technology for the chip consists of 850 nm GaAs/AlGaAs multiquantum well (MQW) detectors and modulators, flip-chip bonded onto silicon CMOS with substrate removal to allow access to the optical devices.