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The characteristics of surface acoustic wave (SAW) based on LiNbO3/diamond/silicon layered structure were investigated. The LiNbO3 film deposited on the diamond/silicon substrate by pulsed laser deposition exhibits highly c-axis (006) preferred orientation. Four samples with different wavelengths were fabricated on the same substrate to study the normalized LiNbO3 thickness dependence of SAW properties. It is shown that the measured phase velocities are in good agreement with the theoretical ones. In the case of 1st wave mode, the SAW device with a linewidth of 1.78 µm exhibits a very high phase velocity of 12 474 m/s in conjunction with a high electromechanical coupling coefficient of 4.85%.
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Zhou et al. (2011) studied this question.
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