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A compact silicon nanomembrane based 1×12 multimode interference coupler (MMI) fabricated on silicon-on-insulator is presented. The strip waveguide structure provides the smallest device size for a single stage MMI with 12 output channels. The MMI exhibits high uniformity up to 0.72 dB and has low loss of 1.13 dB using tranverse-electric (TE) polarised light at 1550 nm wavelength.
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Kwong et al. (2010) studied this question.
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