Cascade wide-angle Y-junction 1 × 16 optical power splitter based on silicon wire waveguides on silicon-on-insulator

A 1 x 16 optical power splitter with wide splitting angle, uniform outputs, and low excess loss is demonstrated. The 1 x 16 splitter comprising cascaded 1 x 2 splitters with arc-shaped branching waveguides is fabricated on the silicon-on-insulator (SOI) substrate. The gap between the branching waveguides is widened in a short propagation length such that influences of etch residues and air voids in the gap on the optical power uniformity are reduced significantly. The measured power uniformity of the 1 x 16 splitter is better than 0.3 dB at wavelength of 1550 nm.