The sidewall passivation of GaAs in atmospheres containing the chain-building molecule BCl3 has been investigated employing Auger electron spectroscopy and time-of-flight secondary ion mass spectrometry. It could be proven that the film that protects the sidewalls from further chemical attack is composed mainly of (B2Cl4)∞ rather than polymers of B2O3.
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Franz et al. (2001) studied this question.
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