Limiting conditions of Si selective epitaxial growth in Si2H6 gas-source molecular beam epitaxy

The limiting conditions are presented of selective epitaxial growth (SEG) on a SiO2-patterned Si (001) substrate for Si gas-source molecular-beam epitaxy by use of 100% Si2H6. In the initial stage of growth, epitaxial Si was selectively grown on a Si surface in the wide temperature range of 500–850 °C. On the other hand, polycrystalline Si nucleation on a SiO2 surface was intimately related to the total volume of supply gas. At a substrate temperature of 700 °C and a Si2H6 flow rate of 60 sccm, a SEG layer could be deposited at a rate as high as 645 Å/min.