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November 4, 2002Journal of Physics D Applied Physics

Two-dimensional modelling of CF4rf plasmas: periodic steady state, transient response after step change of power source voltage, and comparison with one-dimensional modelling

Soon-Youl So Akinori Oda Hirotake Sugawara Yosuke Sakai

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Abstract

Two-dimensional modelling of CF4 rf plasmas: periodic steady state, transient response after step change of power source voltage, and comparison with one-dimensional modelling, Soon-Youl So, Akinori Oda, Hirotake Sugawara, Yosuke Sakai

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So et al. (2002) studied this question.

synapsesocial.com/papers/6a9a7febefd4990121a22fa6 https://doi.org/10.1088/0022-3727/35/22/312

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