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A self-powered vibration sensor based on electromagnetic induction is presented in this paper. The vibration sensor is implemented with stacked flexible coils and polymeric springs. The stacked flexible coil enables large output signal, while long and flexible springs enable high sensitivity and wide linear range of the sensor. At resonance, the sensor has a sensitivity of 1.83 V/g and a maximum resolution of 0.002 g. In the high-frequency range, where the sensor output is frequency-independent (100-3000 Hz), the sensor has a sensitivity of 66.5 mV/g, a maximum resolution of 0.05 g, and a measurement range up to 8.5 g.
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Li et al. (2019) studied this question.
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