Diamond films have been synthesized by the microwave plasma CVD of methane, ethyl alcohol, methyl alcohol and acetone which are diluted with hydrogen. The films are evaluated by X-ray diffraction, SEM image and Raman spectroscopy. When ethyl and methyl alcohols are used, the diamond particles grow at a higher rate with lower gas pressure compared with the case of methane. The lower gas pressure facilitates the preparation of films with a uniform thickness over an available region (5×3.3 cm2) of a reaction tube.
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Watanabe et al. (1988) studied this question.
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