GaAs f.e.t.s with silicon-implanted channels

Field-effect transistors with channel doping profiles fabricated by the implantation of silicon ions into high-resistivity vapour phase epitaxial GaAs have given noise figures of 2.9 dB with an associated gain of approximately 5 dB at 10 GHz. Similar measurements on F.E.T.S fabricated in an identical manner, except for the channel fabrication, where silicon ions were implanted directly into a Cr-doped semi-insulating GaAs substrate, have resulted in nose figures typically 1 dB higher.