Thermal Conductivity Measurements of Sb–Te Alloy Thin Films Using a Nanosecond Thermoreflectance Measurement System

Using a nanosecond thermoreflectance measurement system, which enables the measurement of the thermal conductivity of nanometer-scale thin films, we have measured the thermal conductivities of Sb 2 Te, Sb 2 Te 3 , SbTe 9 , Sb, and Te thin films at room temperature. We clarified that the thermal conductivities of Sb–Te alloys depend on the Sb and Te atomic ratios. A large change in thermal conductivity was observed in the vicinity of the composition ratio of Sb 2 Te 3 . We proposed that this large change may be attributable to the formation of an Sb atomic network in the crystalline structure of the Sb–Te alloy.