High-crystalline-quality epitaxial films of wurtzite AlN were grown by metalorganic vapor phase epitaxy (MOVPE) and hydride vapor phase epitaxy (HVPE). The lattice strain of the films was analyzed by high-resolution X-ray diffraction and the E 2 (high)-phonon frequency was observed by Raman scattering. Data analysis for wide ranges of lattice strains and phonon-peak shifts yielded a precise biaxial stress coefficient of this phonon mode, -4.04±0.3 cm -1 /GPa. Furthermore, the deformation potential constant was accurately determined from the biaxial stress coefficient.
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Yang et al. (2011) studied this question.
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