A simulation model of atomic force microscope and its guidance for scanning surfaces with multi-material properties

A virtual platform for modeling tapping mode atomic force microscopy (TM-AFM) based on Simulink is proposed. The platform integrates detailed models of cantilever dynamics, tip–sample interactions, and closed-loop feedback control, enabling precise prediction of measurements and internal parameter fluctuations through multiphysics co-simulation. The simulations provide effective predictions of system variations when scanning on multi-material surfaces, which reveal that the adhesion force significantly increases the actual amplitude of the cantilever while reducing the system stability. These effects are related to phase lag variations. Experimental validation is performed on a quartz–Au sample at different regions. By comparing with the measurements in contact mode, the experiments confirm that higher adhesion on quartz leads to measurable height errors and distinct phase responses, which agrees closely with simulated predictions. The platform effectively forecasts optimal proportional–integral–derivative (PID) gains for different materials, demonstrating its utility for pre-experimental optimization and the development of adaptive control strategies in TM-AFM.