Resonance Properties of 3C-SiC Nanoelectromechanical Resonator in Room-Temperature Magnetomotive Transduction

We demonstrate the effect of nanoresonator geometry on the resonance property using a magnetomotive transduction technique for SiC nanoresonators in moderate conditions of pressure, temperature, and magnetic intensity. These trials were performed in conditions similar to those useful for practical applications to assist in the deployment of SiC-based nanoelectromechanical system prototype devices. This letter confirms that the resonant properties of a nanoscaled electromechanical resonator in moderate conditions are similar to those found during tests in ideal conditions. The resonance characteristics were analyzed based on the geometrical changes of the nanoresonator. The radio-frequency performance parameters such as the critical amplitude and dynamic range, which are crucial in the determination of linear operation range of nanoresonators, were maintained at a level comparable to those found under laboratory conditions. This letter brings this technology closer to practical applications in sensors, filters, and the oscillation of nanoscaled electromechanical devices.