Enhanced characteristics of an uncooled microbolometer using vanadium–tungsten oxide as a thermometric material

To produce a highly sensitive uncooled microbolometer, the development of a high-performance thermometric material is essential. In this work, amorphous vanadium–tungsten oxide was developed as a thermometric material at a low temperature of 300°C, and the microbolometer, coupled with the material, was designed and fabricated using surface micromachining technology. The vanadium–tungsten oxide showed good properties for application to the microbolometer, such as a high-temperature coefficient of resistance of over −4.0%∕K and good compatibility with the surface micromachining and integrated circuit fabrication process due to its low fabrication temperature. As a result, the uncooled microbolometer could be fabricated with high detectivity over 1.0×109cmHz1∕2∕W at a bias current of 7.5μA and a chopper frequency of 10–20Hz.