In micromechanical acoustic-wave resonators, energy dissipation through the anchors into the substrates may result in a low quality (Q) factor. To eliminate the ill effect of anchor losses, a design of lossless anchor based on phononic crystal (PC) strips for the microacoustic-wave resonators is presented. PC strips with acoustic forbidden bands are introduced to suppress the anchor loss and to serve as the suspensions for bar-type resonators. Numerical analysis shows that the acoustic energy leak can be effectively suppressed and the stored energy inside the resonators can be enhanced. A high-Q resonator with minimized anchor loss is expected.
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Hsu et al. (2011) studied this question.
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