Enhanced magnetic ionization in hydrogen reflex discharge plasma source

The effect of enhanced magnetic ionization on the external and internal parameters of a high-density, low pressure reflex plasma source operating in hydrogen is studied. The Langmuir probe method and Druyvesteyn procedure coupled with suitable software are used to measure the internal parameters. The bulk plasma region is free of an electric field and presents a high degree of uniformity. The electron energy distribution function is bi-Maxwellian with a dip∕shoulder structure around 5.5eV, independent of external parameters and radial position. Due to the enhanced hollow cathode effect by the magnetic trapping of electrons, the electron density ne is as high as 1018m−3, and the electron temperature Te is as low as a few tens of an electron volt, for dissipated energy of tens of Watts. The bulk plasma density scales with the dissipated power.