New Microwave Launcher for Producing ECR Plasmas without Window Contamination I. Excitation of Electron Cyclotron Wave

A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.