Experimental study demonstrates enhanced electromechanical coupling and suppressed spurious modes in Lamb wave resonators, suggesting improved acoustic filter performance.
A first-order ( S 1 ) Lamb wave resonator (LWR) with a trapezoid grooves configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed in this paper. Both the simulation and experiment results demonstrate that the k e f f 2 can be enhanced with the depth of the trapezoid grooves increasing. Meanwhile, the spurious modes can be suppressed by the trapezoid grooves. A 75% improvement on the k e f f 2 has been achieved in a 2.45 GHz S 1 mode LWR with trapezoid grooves with spurious modes free. The k e f f 2 reaches up to 5.47% without quality factor degradation.
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Fan et al. (2023) studied this question.
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