A fabrication technique for a waveguide cavity with submillimetre dimensions is reported. The cavity was composed of galvanoformed nickel structures. A mould for the galvanoforming was made from a thick-film UV-photoresist. Using a semiconductor superlattice as active element, generation of millimetre-waves (170 GHz) was observed, but with subharmonics owing to yet insufficient suppression of bias oscillations. The microstructuring technique may be suitable for the development of solid-state radiation sources up to THz frequencies.
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Haeussler et al. (2003) studied this question.
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