Modern diagnostic methods are applied for investigation of spatial and temporal behaviour of selected reactive species in oxygen and fluorocarbon rf plasmas. Comprehensive investigations of the spatial distribution of atomic oxygen were done by means of two‐photon absorption laser induced fluorescence spectroscopy. Exemplarily, axial and radial O‐concentrations are shown for an asymmetric capacitively coupled rf plasma in pure oxygen. The time resolved threshold ionization mass spectrometry was applied for investigation of small fluorocarbon radicals. In pulsed CF4/H2 rf plasma the concentrations of the extracted radicals CF2, CF3, C2F5 as well as the intermediate product C2F4 in the plasma on and off phase are presented. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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Geigl et al. (2005) studied this question.
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