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A geometric study of image generation in the AFM is reported. The relationship of an AFM waveform to the surface morphology being examined is determined, allowing for the influence of the radius and the vertex and obliquity angles of the tip. AFM calibration procedures are proposed and experimentally validated on trapezoidal surface patterns. Methods are described for direct measurement of linear dimensions, including linewidth, on the basis of original and differentiated AFM waveforms.
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Novikov et al. (2008) studied this question.
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