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A compact-size fiber optic accelerometer was designed to achieve both high resolution and wide dynamic range concurrently. An optical cavity, with its length modulated by a piezoelectric oscillator at audio frequency, is utilized to resolve the nanometer-level displacement of a silicon micro-mirror which serves as an inertial mass for acceleration sensing. Strain analysis of the proof-mass flexure structure by Cosmosworks was carried out to calculate responsivity and resonance frequency for a comparison with experimental measurement. The responsivity below the structural resonance frequency of 160 Hz reaches 36 dB re 1 rad/ g . Performance measurement demonstrated that the accelerometer was able to resolve an acceleration of 48 n g Hz −1/2 with a dynamic range of 2 × 10 7 .
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Lin et al. (2010) studied this question.
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