Gas-Source Molecular Beam Epitaxy Growth of Metamorphic InP/In0.5Al0.5As/In0.5Ga0.5As/InAsP High-Electron-Mobility Structures on GaAs Substrates

Advanced metamorphic high-electron-mobility heterostructures were grown by gas-source molecular beam epitaxy (gas-source MBE). These structures included an InGaAs/InAsP composite channel layers to improve breakdown voltage and a thin InP stopper layer under the n-InGaAs contact layer to provide long-term reliability and highly selective etching for mass production. Even though the graded buffer layer was thin (0.45 µm), misfit dislocations, observed by transmission-electron microscopy (TEM), were confined effectively to this thin buffer layer. High mobilities of over 9000 cm 2 V -1 s -1 were obtained with the thin compositionally graded InAlAs buffer layer when the As composition of the InAsP sub-channel layer was less than 0.2.