Force, deflection and power measurements of toggled microthermal actuators

Force and power characteristics are experimentally measured for three types of toggling microthermal actuators: (i) standard two-arm thermal actuators, (ii) chevron or 'V' type actuators and (iii) chevron actuators with a toggle amplifier. Micro-Newton scale forces and micron scale displacements are experimentally measured using an off-chip probe. For each type of actuator, force versus deflection curves are measured to determine mechanical advantage and maximum ranges. For each type of actuator, work output versus input power curves are measured to determine actuator effectiveness. Different actuator designs are compared in terms of force, displacement, power and effectiveness.