A scanning probe lithography method based on a novel molybdenum thin film resist is presented. The lithography technique takes advantage of the highly selective etching of a metal oxide, MoO3, by water, which makes the lithographic process simple, reliable, and compatible with biological systems. The method can be used to fabricate metal nanowires on insulating substrates. The Figure shows 35 nm wide Ti lines formed on a SiO2 substrate.
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Rolandi et al. (2002) studied this question.
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