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March 1, 1980Journal of The Electrochemical SocietyOpen Access

On the Kinetics of the Thermal Oxidation of Silicon: I . A Theoretical Perspective

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WTWilliam A. TillerFord Foundation

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William A. Tiller (1980) studied this question.

synapsesocial.com/papers/6a9e211e46bb483cebf6caaahttps://doi.org/10.1149/1.2129722
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