We have studied shape transformation of micron-sized trenches on Si substrates during high temperature hydrogen annealing, performing numerical simulations based on Mullins' theory. We have considered evaporation-condensation and surface diffusion as mass transport mechanisms causing shape transformation. The simulation allowing only surface diffusion reproduces well the observed micron-scale aspects of shape transformation by hydrogen annealing at 1000–1150°C.
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Sudoh et al. (2004) studied this question.
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