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Single crystal diamond is a kind of crystal material with excellent performance, which has important application value in advanced scientific field. In the field of single crystal diamond growth by microwave plasma chemical vapor deposition (MPCVD), improvement of crystal growth rate is still a key challenge, although corrent high energy density plasma has been a ralatively effective method. In this work, a special plasma focusing structure was designed through magnetohydrodynamic (MHD) model simulation which then was used in the growth experiment
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LI et al. (2023) studied this question.
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