Parasitic Channel Induced by Spin‐On‐Glass in a Double‐Level Metallization Complimentary Metal Oxide Semiconductor Process: Its Formation and Method of Suppression, Murata, M., Yamauchi, K., Kojima, H., Yokoyama, A., Inoue, T., Iwamori, T.
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Murata et al. (1993) studied this question.