Thermodynamic Aspects of Diamond/β‐SiC Composite Films

A thermodynamic equilibrium analysis involving H2CH4Si(CH3)4 (tetramethylsilane, TMS) gas mixtures is made to understand the evolution of major gas‐phase species and to predict the solid‐phase co‐deposition of diamond and β‐SiC phases. The equilibrium compositions are analyzed at the practical deposition conditions of nanocrystalline diamond/β‐SiC composite films. The influence of various predominant species on the equilibrium compositions is investigated.