Lead zirconate titanate (PZT) films were prepared on Pt(100)/MgO(100) substrates by metalorganic chemical vapor deposition. By optimizing the deposition conditions, c-axis oriented PZT epitaxial films were obtained. The epitaxial PZT films deposited on Pt/MgO substrates exhibited dielectric constants as high as 425, remanent polarization of 50 µC/cm2, a coercive field of 33 kV/cm a leakage-current smaller than 10-6 A/cm2 at the electric field lower than 200 kV/cm.
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Sakurai et al. (1997) studied this question.
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