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A new instrument capable of high resolution (0.1 mu m) scanning electron microscopy and selected area Auger electron microscopy as well as fast (100 s) Auger imaging facility at lower resolution (5-10 mu m) is described. The instrument is a true surface analysis tool and is completely of ultrahigh vacuum (UHV) construction. The approach of using two separate electron guns is explained and some results are presented. Some problems of proper Auger imaging are discussed. A special specimen transfer facility for UHV is also described.
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Powell et al. (1975) studied this question.
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