The ionic species arriving at the substrate plane of an rf glow discharge sputtering system have been observed mass spectrometrically, using such target materials as elemental metals, alloys, various inorganic compounds, and organic solids. It is believed that in most instances the ionic species are indicative of the relative abundance of the neutral species arriving at the substrates, and a discussion will be presented of the extent to which the observed species are characteristic of the material leaving the target electrode.
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Coburn et al. (1975) studied this question.
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