Electrically Injected Quantum-Dot Photonic Crystal Microcavity Light-Emitting Arrays With Air-Bridge Contacts

We demonstrate direct electrical carrier injection into membrane photonic crystal (PC) microcavities with quantum-dot radiating elements via metallic air-bridges. The bridges are 300 nm tall, 200-400 nm wide, 3-13 mum long, and have surface contact width ~200-300 nm. We demonstrate arrays of electrically injected membrane PC microcavities interconnected by nano-bridges. The technology demonstrated here represents an attractive route to fabricate densely packed electrically injected PC light sources