Two-dimensional simulation of inductively coupled plasma based on COMSOL and comparison with experimental data

A two-dimensional axisymmetric inductively coupled plasma (ICP) model, and its implementation in the COMSOL multiphysical software, is described. The simulations are compared with the experimental results of argon discharge from the gaseous electronics conference RF reference cell in the inductively coupled plasma mode. The general trends of the number density and temperature of electrons with radial scanning are approximately correct. Finally, we discuss the reasons why the comparisons are not in agreement, and then propose an improvement in the assumptions of the Maxwellian electron energy distribution function and reaction rate.