The terminating atomic plane of SrTiO3 (001) surface was investigated by means of coaxial impact-collision ion scattering spectroscopy (CAICISS). CAICISS spectra proved that SrTiO3 (001) surfaces of as-supplied substrates as well as of O2-annealed substrates were predominantly terminated with TiO2 atomic plane, while the SrO atomic plane came at the topmost surface of SrTiO3 (001) homoepitaxial film. This indicates the structural conversion of the topmost atomic layer from TiO2 to SrO occurred during the SrTiO3 homoepitaxial growth. The azimuth rotational CAICISS spectra exhibited a fourfold symmetry in the surface atom alignments, showing the square lattice structure of a terminating plane.
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Yoshimoto et al. (1994) studied this question.
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