We have coupled an Auger spectrometer to a conventional scanning electron microscope. Specimens were examined without an ultrahigh vacuum by maintaining a high partial pressure of argon in the vicinity of the specimen. It was possible to examine the specimens by means of both Auger and x‐ray microanalysis. Sputtering profiles could be recorded by removing surface layers by ion bombardment. Examples of the application of the method are drawn from studies of surface layers on metals, and are compared with XRMA results.
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Holm et al. (1978) studied this question.
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