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A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 µs. A crosstalk of −32 dB has been measured.
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Bakke et al. (2002) studied this question.
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